Semiconductor Advanced Ceramics End Effector
Alumina ceramic end effectors and ceramic arms have excellent strength, stiffness, wear resistance, electrical resistance, high thermal stability, high corrosion resistance, and they are lightweight. They constitute the end of the robot arm, used for handling and moving the semiconductor wafers with higher efficiency and precision.
Alumina ceramics for the semiconductor industry got high purity with low content of trace metals, and they have strong dielectric properties, which means they can constitute either the process chamber material or interior process surfaces for CVD, PVD, plasma etching.
